A scribing, dicing or microprocessing tool that has stopped holds up everything downstream of it, and the assembly the quote names is the one nobody is allowed to open. We work the system around the optics: the source interface, the beam path, the stage, the controls, the extraction and the utilities.
A wafer-level laser tool is three machines sharing a frame. There is the laser and its optical train, which on most platforms is a module the builder supplies as a sealed unit. There is a precision stage with its own metrology, drives and controller. And there is the plant around both: extraction, cooling, compressed air, vacuum, power conditioning and the safety chain that lets any of it run.
Those three fail differently and they are owned differently. The sealed optical module belongs to its maker - on stealth-dicing platforms it is a laser and optical module developed by a third party under its own patents, and nothing we do opens it. The stage, the controls, the utilities and the interfaces between them are ordinary precision machinery, and that is where an independent service firm is useful.
Owners describe an outcome, not a cause, and that is the right way round. What we hear:
In scope: the source interface and its control and power electronics, beam delivery outside the sealed module, the scanner and its drive electronics, the stage and motion system with its feedback and drives, the machine controller and its I/O, the safety chain and interlocks, extraction and filtration, cooling, and the utility interfaces.
Not in scope, and said before a quote rather than after: a sealed or proprietary optical module is not opened. It is replaced, or routed back to its maker, and the written proposal says which. Process qualification - whether the tool is producing acceptable die - belongs to the fab and to nobody else.
An evaluation comes first and it is quoted as a fixed fee before anyone travels. We record the machine and its serial, the configuration as found rather than as documented, what changed before the symptom appeared, and the state of the subsystems listed above.
What you get back is a written report: what was found, what we propose, what we would repair, what we would replace, what we would route elsewhere, and the commercial options with each. You decide. Nothing proceeds on a verbal.
Enough to answer you properly, and nothing that needs the machine opened.
We do not promise a specific repair before diagnosis, and we do not certify equipment to original published specifications where the original acceptance data and the corresponding standards are unavailable.
PhaseX Laser Services is a registered DBA of CoreX Robotics Services LLC and an independent service company. We are not an authorized service centre, agent, representative or affiliate of any manufacturer named on this page, and we do not perform manufacturer warranty work. Brand and model names identify equipment only and remain the property of their respective owners. Work on equipment under an active manufacturer warranty is performed only within a scope authorized in writing by the equipment seller or manufacturer.
A proprietary or closed optical module is not opened. Source interface, cooling, motion, control, safety, extraction, utilities and peripherals are in scope; the sealed module is replaced or routed to the OEM.
Work is carried out to the site rules and the laser safety arrangements in force at your facility. The Laser Safety Officer is designated by the employer, never by PhaseX; hazard classification, nominal hazard zone determination and any compliance opinion stay with your own officer.
No. On stealth-dicing and similar platforms the laser and optical module is a sealed unit built by a third party under its own patents, and we do not open it. What we do is establish whether the module is actually the problem, and service everything around it: the stage, the drives, the controller, the safety chain, the extraction and the utilities. If the module is at fault we say so, and it is replaced or routed back to its maker.
That is your call and your protocol, not ours. We work to the access rules, gowning and qualification requirements the facility sets, and where those cannot be met we work on subassemblies removed to a bench. What we will not do is claim a cleanroom qualification we do not hold.
That is the question an independent evaluation exists to answer. We evaluate the machine around the quoted assembly - the stage, the controls, the utilities, the general condition - and give you a written view of what the rest of the tool has left in it. The decision stays yours and we have no interest in the outcome either way.
No. Lithography and EUV platforms are under total OEM service control, and we decline that work rather than stretch a scope to cover it.
Five fields to start, and no obligation either way. We reply with an assessment and, where site or bench work makes sense, a written scope and a fixed fee for your approval.